Artículos de revistas
Controlled Fluorination Of A-c:f:h Films By Pecvd Of Ethylene-hexafluorobenzene Mixtures
Registro en:
Surface And Coatings Technology. , v. 203, n. 5-7, p. 526 - 529, 2008.
2578972
10.1016/j.surfcoat.2008.08.032
2-s2.0-56049110823
Autor
Lopes B.B.
Davanzo C.U.
Schreiner W.
Durrant S.F.
Institución
Resumen
Highly fluorinated plasma polymers are chemically inert, acid resistant and have low friction coefficients, thereby being useful in chemical laboratories and for tribological applications. Here we report the plasma polymerization of ethylene-hexafluorobenzene mixtures by PECVD. The principal parameter of interest is the proportion of C6F6 in the feed, RF. Films were analyzed using near-normal and grazing-angle Infrared Reflection Absorption Spectroscopy (IRRAS), the latter being particularly useful for detecting modes not usually observed at near-normal incidence. The presence of CH and CFx (x = 1 to 2) groups was thus confirmed in films deposited with RF ≥ 40%. Depending on RF, IRRAS also revealed the presence of -CHx (x = 1 to 3) -C{double bond, short}C, -C{double bond, short}O and phenyl rings. Deconvolution of C 1s spectra obtained by X-ray Photoelectron Spectroscopy (XPS) confirmed the presence of CH, CF and CF2 groups in films deposited with RF ≥ 40%. Atomic ratios of F:C calculated from the XPS spectral data show that the degree of fluorination rises with increasing RF. Some unbound fluorine is present in the films. Post-deposition reactions account for the presence of oxygen (~ 5%) in the films. Surface energies, determined from contact angle measurements, fall with increasing RF. © 2008 Elsevier B.V. All rights reserved. 203 5-7 526 529 Durrant, S.F., Mota, R.P., de Moraes, M.A.B., (1992) J. Appl. Phys., 71, p. 448 Iriyama, Y., Yasuda, T., Cho, D.L., Yasuda, H., (1990) J. Appl. Polym. Sci., 39, p. 249 Jaszewski, R.W., Schift, H., Schnyder, B., Schneuwly, A., Gröning, P., (1999) Appl. Surf. Sci., 143, p. 301 Yi, J.W., Lee, Y.H., Farouk, B., (2000) Thin Solid Films, 374, p. 103 Maier, G., Haussmann, J., Dietlmeier, M., Banerjee, S., (1999) Macromol. Symp., 142, p. 85 Hynes, A.M., Shenton, M.J., Badyal, J.P.S., (1996) Macromolecules, 29, p. 18 Sandrin, L., Siverstein, M.S., Sacher, E., (2001) Polymer, 42, p. 3761 Jiang, H., Johnson, W.E., Grant, J.T., Eyink, K., Johnson, E.M., Tomlin, D.W., Bunning, T.J., (2003) Chem. Mater., 15, p. 340 Yu, G.Q., Tay, B.K., Sun, Z., Pan, L.K., (2003) Appl. Surf. Sci., 219, p. 228 Durrant, S.F., Baranuskas, V., Peterlevitz, A.C., Castro, S.G., Landers, R., de Moraes, M.A.B., (2001) Diamond Relat. Mater., 10, p. 490 Korotkov, R.Y., Goff, T., Ricou, P., (2007) Surf. Coat. Technol., 201, p. 7207 Clark, D.T., Shuttleworth, D.J., (1980) J. Polym. Sci., Polym. Chem. Ed., 18, p. 27 Clark, D.T., Abrahman, M.Z., (1982) J. Polym. Sci., Polym. Chem. Ed., 20, p. 1729 Clark, D.T., Abraham, M.Z., (1982) J. Polym. Sci., Polym. Chem. Ed., 20, p. 1717 Durrant, S.F., Mota, R.P., RP, de Moraes, M.A.B., (1992) Thin Solid Films, 220, p. 295 D Agostino, R., Cramarossa, F., Caloprico, V., d'Ettole, R., (1983) J. Appl. Phys., 54, p. 1284 Tressaud, A., Durand, E., Labrugère, C., Kharitonov, A.P., Kharitonova, L.N., (2007) J. Fluorine Chem., 128, p. 378 Rangel, E.C., Durrant, S.F., Rangel, R.C.C., Kayama, M.E., Landers, R., da Cruz, N.C., (2006) Thin Solid Films, 515, p. 1561 Durrant, S.F., Rangel, E.C., da Cruz, N.C., Castro, S.G.C., de Moraes, M.A.B., (1996) Surf. Coat. Technol., 86, p. 443 Sverdlov, L.M., Kovner, M.A., Krainov, E.P., (1974) Vibrational Spectra of Polyatomic Molecules, , Halsted Press, New York Varsanyi, G., (1974) Assignments for Vibrational Spectra of Seven Hundred Benzene Derivatives, 1. , Wiley, New York Yasuda, H., Bumgarner, M.O., Marsh, H.C., Morosoff, N., (1976) J. Polym. Sci., Polym. Chem. Ed., 14, p. 195 Durrant, S.F., Castro, S.G., Cisneros, J.I., da Cruz, N.C., de Moraes, M.A.B., (1996) J. Vac. Sci. Technol., A, Vac. Surf. Films, 14, p. 118 Durrant, S.F., de Moraes, M.A.B., (1996) Thin Solid Films, 277, p. 115 Yasuda, H., Hsu, T., (1977) J. Polym. Sci., Polym. Chem. Ed., 15, p. 81 Mackie, N.M., Castner, D.G., Fisher, E.R., (1998) Langmuir, 14, p. 1227 Yang, G.H., Oh, S.W., Kang, E.T., Neoh, K.G., (2002) J. Vac. Sci. Technol., A, Vac. surf. Films, 20, p. 1955 Tran, N.D., Dutta, N.K., Choudhury, N.R., (2005) Thin Solid Films, 491, p. 123