Artículos de revistas
Synthesis Of Carbon Nitride Films At Low Temperatures
Registro en:
Journal Of Vacuum Science And Technology A: Vacuum, Surfaces And Films. , v. 15, n. 1, p. 107 - 112, 1997.
7342101
2-s2.0-0031543052
Autor
Hammer P.
Baker M.A.
Lenardi C.
Gissler W.
Institución
Resumen
Carbon nitride films (CN x) have been deposited by sputtering a graphite target with nitrogen ions. Films were grown both with and without the presence of an assisting focused N 2 ion beam. The sputter beam voltage was varied between 150 and 1500 V and the applied assisting beam voltage from 80 to 500 V. The substrate was held at fixed temperatures between 80 and 673 K. The coatings were characterized with respect to their electrical, optical, and structural properties. The nitrogen content was measured by x-ray photoelectron spectroscopy (XPS) and a maximum nitrogen concentration of 44 at. % was obtained for a nonassisted sample deposited at 140 K. The chemical structure was investigated by XPS and Fourier transform infrared spectroscopy. Reduction of the substrate temperature in conjunction with low sputter beam voltages (<200 V) caused the optical band gap to increase up to 2.2 eV, the sheet conductivity to decrease to less th an 10 -9 (Ω cm) -1 and the density to be reduced to 1.6 g/cm 3. The increasing transparency is accompanied by structural changes indicating a transition from a predominantly sp 2 bonded amorphous sp 2/sp 3 C-N network to a more linear polymerlike structure consisting predominantly of doubly and triply bonded C and N atoms. No evidence for the formation of the β-C 3N 4 phase was found. © 1997 American Vacuum Society. 15 1 107 112 Hammer, P., Gissler, W., (1996) Diam. Relat. Mater., 5, p. 1152 Hammer, P., Baker, M.A., Lenardi, C., Gissler, W., Thin Solid Films, , to be published Todorov, S.S., Marton, D., Boyd, K.J., Al-Bayati, A.H., Rabalais, J.W., (1994) J. Vac. Sci. Technol. A, 12, p. 3192 Liu, A.Y., Cohen, M.L., (1990) Phys. Rev. B, 41, p. 10727 Baker, M.A., Hammer, P., Surf. Interface Anal., , submitted Kaufman, J.H., Metin, S., Saperstein, D.D., (1989) Phys. Rev. B, 39, p. 13053 Dolphin, D., Wick, A., (1977) Tabulation of Infrared Spectral Data, , Wiley, New York Socrates, G., (1980) Infrared Characteristic Group Frequencies, , Wiley, Chichester, U.K Sjöström, H., Stafström, S., Boman, M., Sundgren, J.E., (1995) Phys. Rev. Lett., 75, p. 1336 Marton, D., Al-Bayati, A.H., Todorov, S.S., Boyd, K.J., Rabalais, J.W., (1994) Nucl. Instrum. Methods Phys. Res. B, 90, p. 277 Sjöström, H., Hultman, L., Sundgren, J.-E., Hainsworth, S.V., Page, T.F., Theunissen, G.S.A.M., (1996) J. Vac. Sci. Technol. A, 14, p. 56 Briggs, D., Clark, D.T., Keable, H.R., Kilner, M., (1973) J. Chem. Soc. Dalton Trans., p. 2143 Barber, M., Conner, J.A., Guest, M.F., Hillier, I.H., Schwartz, M., Stacey, M., (1973) J. Chem. Soc. Faraday Trans. II, 69, p. 551 Bircumshaw, L.L., Tayler, F.M., Whiffen, D.H., (1954) J. Chem. Soc., p. 931