Artículos de revistas
Ion Irradiation Effects On A-c:h, A-c:n:h And A-c:f:h Films
Registro en:
Nuclear Instruments And Methods In Physics Research, Section B: Beam Interactions With Materials And Atoms. , v. 249, n. 1-2 SPEC. ISS., p. 409 - 413, 2006.
0168583X
10.1016/j.nimb.2006.04.040
2-s2.0-33745850797
Autor
Galvao J.R.
Luce F.P.
Baptista D.L.
da Costa M.E.M.M.
Lepienski C.M.
Zawislak F.C.
Institución
Resumen
Hydrogenated amorphous carbon (a-C:H) films as well as films with incorporated nitrogen (a-C:N:H) and fluorine (a-C:F:H) have been irradiated with 400 keV N+ at fluences ranging from 1014 to 3 × 1016 ions cm-2. The films were 200 nm thick deposited on Si and irradiated at RT. The loss of H, N and F as function of the irradiated fluences was monitored via nuclear reactions. The results show that: (i) the loss of H in all cases is well explained by the molecular recombination model; (ii) there is no loss of N and F as function of fluence for the a-C:N:H and a-C:F:H films. The evolution of the hardness and Young modulus for the three films reach the same values of ≈12 and 130 GPa, respectively, at maximum fluence. The intrinsic stress data show a change from a compressive stress to a relaxed structure after irradiations. The Raman data confirm the microstructural evolution of the samples into a structure containing a large number of disordered sp2-C clusters. © 2006 Elsevier B.V. All rights reserved. 249 1-2 SPEC. ISS. 409 413 Robertson, J., (2001) Thin Solid Films, 383, p. 81 Gunther, J., Reschke, J., (1993) Surf. Coat. Technol., 60, p. 531 Tainen, V., (2001) Diamond Relat. Mater., 10, p. 153 Robertson, J., (1986) Adv. Phys., 35, p. 317 Robertson, J., (1991) Prog. Solid State Chem., 21, p. 199 Franceschini, D.F., Achete, C.A., Freire Jr., F.L., (1992) Appl. Phys. Lett., 60, p. 3229 Franceschini, D.F., Freire Jr., F.L., Silva, S.R.P., (1996) Appl. Phys. Lett., 68, p. 2645 Metin, S., Kaufman, J.H., Saperstein, D.D., Scotch, J.C., Heyman, J., Haller, E.E., (1994) J. Mater. Res., 9, p. 396 Sah, R.E., Dischler, B., Bubenzer, A., Koidl, P., (1985) Appl. Phys. Lett., 46, p. 739 Prioli, R., Jacobsohn, L.G., Maia da Costa, M.E.H., Freire Jr., F.L., (2003) Tribol. Lett., 15, p. 177 Oliver, W.C., Pharr, G.M., (1992) J. Mater. Res., 7, p. 1564 Stoney, G.G., (1909) Proc. Roy. Soc. London Ser. A, 82, p. 172 Freire Jr., F.L., (2002) J. Non-Cryst. Solids, 304, p. 251 Jacobsohn, L.G., Franceschini, D.F., Maia da Costa, M.E.H., Freire Jr., F.L., (2000) J. Vac. Sci. Technol. A, 18, p. 2230 Adel, M.E., Amir, O., Kalish, R., Feldman, L.C., (1989) J. Appl. Phys., 66, p. 3248 Baptista, D.L., Zawislak, F.C., (2004) Diamond Relat. Mater., 13, p. 1791 Baptista, D.L., Garcia, I.T.S., Zawislak, F.C., (2004) Nucl. Instr. and Meth. B, 219, p. 846 Ferrari, A.C., Robertson, J., (2000) Phys. Rev. B, 61, p. 10451