Actas de congresos
Use Of A Langmuir Probe For Ecr Plasma Characterization
Registro en:
Proceedings - Electrochemical Society. , v. 3, n. , p. 375 - 380, 2004.
2-s2.0-17044361859
Autor
Daltrini A.M.
Moshkalyov S.A.
Ramos A.C.S.
Swart J.W.
Institución
Resumen
A Langmuir electric probe which can be used in single, double and triple probe configurations, was installed in a high density electron cyclotron resonance (ECR) plasma reactor. The first results for electron temperature and density for different gases (Ar and Ar/N2), pressures and microwave power are presented. 3
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