Actas de congresos
Replication Of Diffractive Optical Elements By Injection Molding
Registro en:
Proceedings Of Spie - The International Society For Optical Engineering. , v. 5622, n. PART 2, p. 739 - 744, 2004.
0277786X
10.1117/12.592206
2-s2.0-17644419257
Autor
Carvalho E.J.
Braga E.S.
Cescato L.
Institución
Resumen
In this paper we describe the replication processes of DOE carried out at the Diffractive Optics Laboratory/UNICAMP for replicating DOE. In particular we present the results obtained in the replication by injection molding of microlens array, diffraction gratings and polarizing elements. The measurements of the geometric dimensions of the DOE masters, the nickel shims and the replicated structures were accomplished by perfilometry, AFM and SEM microscopy. The optical properties of both the DOE masters and their replicas were evaluated by measuring of the diffraction efficiency as a function of the incident wavelength, for orthogonal polarizations. 5622 PART 2 739 744 Goodman, J.W., (1996) "Introduction to Fourier Optics", Second Edition, , Mac-Graw Hill Soares, L.L., Cescato, L., Metallized photoresist graating as polarizing beam-splitters (2001) Applied Optics, 40 (32), pp. 5906-5910 Turunen, Wyrowski, (1997) Diffractive Optics for Industrial and Commercial Applications, , Akademie Verlag, Berlim Gale, M.T., Replication techniques for diflractive optical elements (1997) Microeletronic Engineering, 34, pp. 321-339 Nikolajeff, F., Jacobsson, S., Hard, S., Billman, A., Lundbladh, L., Lindell, C., Replication of continuous-relief diffractive optical elements by conventional compact disc injection-molding techniques (1997) Applied Optics, 36, p. 4655 Daly, D., Stevens, R.F., Hutley, M.C., Davies, N., The manufacture of microlenses by melting photoresist (1990) J. Meas. Sci. Techn., 1, pp. 759-766 Nussbaum, Ph., Gonté, F., Boillat, C., Herzig, H.P., Low NA fused silica refractive microlenses for Shack-Hartmann wavefront sensor (2000) Diffractive Optics and Micro-optics, pp. 247-249. , Québec, June 18-22 Carvalho, E.J., (2003) Desenvolvimento de Processes de Replicação de Elementes Ópticos Difrativos, , Master thesis, IFGW/UNICAMP