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PECVD of amorphous hydrogenated oxygenated nitrogenated carbon films
(John Wiley & Sons IncNew YorkEUA, 1998)
HMDSO plasma polymerization and thin film optical properties
(1995-12-01)
Thin films were deposited from hexamethyldisiloxane (HMDSO) in a glow discharge supplied with radiofrequency (rf) power. Actino-metric optical emission spectroscopy was used to follow trends in the plasma concentrations ...
HMDSO plasma polymerization and thin film optical properties
(1995-12-01)
Thin films were deposited from hexamethyldisiloxane (HMDSO) in a glow discharge supplied with radiofrequency (rf) power. Actino-metric optical emission spectroscopy was used to follow trends in the plasma concentrations ...
Plasma-deposition of Ag-containing polyethyleneoxide-like coatings
(2000-03-01)
Ag-containing polyethyleneoxide (FEO)-like thin films have been deposited in Radio Frequency Glow Discharges fed with vapors of diethyleneglycol-dimethyl-ether and argon. Proper experimental conditions have been utilized ...
Thin film deposition from plasmas of tetramethylsilane-helium-argon mixtures with oxygen and with nitrogen
(John Wiley & Sons IncNew YorkEUA, 1998)
Dynamic actinometric optical emission spectroscopy for the elucidation of plasma processes in the production of fluorinated amorphous hydrogenated carbon films from glow discharges
(Elsevier Science Sa LausanneLausanne 1Suíça, 1996)
Structural and optical properties of amorphous hydrogenated fluorinated carbon films produced by PECVD
(Elsevier Science Sa LausanneLausanneSuíça, 1997)
Optical and electrical properties of polymerizing plasmas and their correlation with DLC film properties
(Springer, 2004-03-01)
Diamond-like carbon (DLC) films were grown from radiofrequency plasmas of acetylene-argon mixtures, at different excitation powers, P. The effects of this parameter on the plasma potential, electron density, electron ...