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Nanocrystalline GaN and GaN:H films grown by RF-magnetron sputtering
(2006-09-01)
The structural and optical properties of nanocrystalline GaN and GaN:H films grown by RF-tnagnetron sputtering are focused here. The films were grown using a Ga target and a variety of deposition parameters (N 2/H 2/Arflow ...
Reactive sputter magnetron reactor for preparation of thin films and simultaneous in-situ structural study by X-ray diffraction.
(Laboratório Nacional de Luz SíncrotronCampinas, 2013-02-26)
Reactive Sputter Magnetron (RSM) is a widely used technique to thin films growing
of compounds both, in research laboratories and in industrial processes. The nature
of the deposited compound will depend then on the ...
Application of Taguchi arrays using DOE for optimizing processing and understanding sputtered coated ZnO TFTs
(2021-01-01)
This study applies the Taguchi orthogonal array (OA) to improve and optimize the performance of ZnO thin-film transistors (TFT). Radiofrequency (RF) sputtering method was used to deposit the active layer of TFTs. The ...
Growth evolution of ZnO thin films deposited by RF magnetron sputtering
(Iop Publishing Ltd, 2012-01-01)
We study the surface morphology evolution of ZnO thin films grown on glass substrates as a function of thickness by RF magnetron sputtering technique. The surface topography of the samples is measured by atomic force ...
Understanding UV sensor performance in ZnO TFTs through the application of multivariate analysis
(Ieee, 2018-01-01)
Zinc oxide (ZnO) thin film transistors are well suited to UV sensing application because they absorb predominantly in the UV region due to the wide bandgap (Eg = 3.37 eV) and possess a large exciton binding energy (60 meV) ...
Understanding UV sensor performance in ZnO TFTs through the application of multivariate analysis
(2018-01-01)
Zinc oxide (ZnO) thin film transistors are well suited to UV sensing application because they absorb predominantly in the UV region due to the wide bandgap (Eg = 3.37 eV) and possess a large exciton binding energy (60 meV) ...
Fabrication and characterization of GeO2-PbO optical waveguides
(2009-12-01)
This work presents studies of GeO2-PbO thin films deposited by RF Sputtering for fabrication of rib-waveguide. GeO2-PbO vitreous targets were prepared melting the reagents in alumina crucible. Thin films were deposited at ...
Structural Properties Of A-ge1-xcx:h Alloys Prepared By The Rf Sputtering Technique
(MRS, Warrendale, PA, United States, 1997)