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Nanocrystalline carbon flakes deposited by RF magnetron sputtering
(Elsevier, 2016)
Carbon nanostructures were prepared by RF magnetron sputtering at deposition times from 30 to 120 min and temperatures on silicon substrates from 390 degrees C to 510 degrees C. Scanning and transmission electron microscopy ...
Characterization of thin carbon films produced by the magnetron sputtering technique
(2016-05-01)
Thin carbon films containing both amorphous and crystalline structures were produced by RF magnetron sputtering. The depositions of the carbon films were performed on Co buffer layers previously deposited on c-plane (0001) ...
Electro-optically sensitive diamond-like carbon thin films deposited by reactive magnetron sputtering for electronic device applications
(ELSEVIER SCIENCE SA, 2011)
The goal of this work is to study and relate electrical and optical properties of diamond-like carbon (DLC) thin films for applications in electronic devices. DLC films were deposited in a reactive RF magnetron sputtering ...
Nanocrystalline carbon flakes deposited by RF magnetron sputtering
(2016)
Carbon nanostructures were prepared by RF magnetron sputtering at deposition times from 30 to 120 min and temperatures on silicon substrates from 390 degrees C to 510 degrees C. Scanning and transmission electron microscopy ...