Dielectric and ferroelectric properties of PZT and PT thin films for saw sensors applications

dc.contributorUniversidade Estadual Paulista (Unesp)
dc.date.accessioned2014-05-27T11:21:14Z
dc.date.available2014-05-27T11:21:14Z
dc.date.created2014-05-27T11:21:14Z
dc.date.issued2004-12-01
dc.identifierProceedings - Electrochemical Society, v. 3, p. 319-324.
dc.identifierhttp://hdl.handle.net/11449/68062
dc.identifier2-s2.0-17044364352
dc.identifier6725982228402054
dc.identifier1525717947689076
dc.description.abstractIt is very important for the building of the SAW devices to study dielectric and ferroelectrics properties because every SAW device is based in piezoelectric effect that it is made up to transform an electric sign in the mechanical or acoustic sign and a mechanical or acoustic sign in an electric sign. Thus, the purpose of the present work is to prepare PbZr 0,53Ti0.47O3 (PZT) and PbTiO3 (PT) thin films on the Si (100) substrates across spin-coating using a chemical method based in polymeric precursors. After conventional treatment in the furnace, the films were characterized by impedance spectroscopy and hysteresis loops to know its dielectric and ferroelectric properties.
dc.languageeng
dc.relationProceedings - Electrochemical Society
dc.rightsAcesso aberto
dc.sourceScopus
dc.subjectCapacitors
dc.subjectCarboxylic acids
dc.subjectFerroelectric materials
dc.subjectLead compounds
dc.subjectMicrosensors
dc.subjectPolyethylene glycols
dc.subjectShear waves
dc.subjectSilicon
dc.subjectSolutions
dc.subjectStoichiometry
dc.subjectTitanium compounds
dc.subjectChemical methods
dc.subjectHysteresis loops
dc.subjectMechanical energy
dc.subjectPiezoelectric substrates
dc.subjectThin films
dc.titleDielectric and ferroelectric properties of PZT and PT thin films for saw sensors applications
dc.typeActas de congresos


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